Vacuum Sensor 7/160: General
Type
Vacuum pressure sensor: Double piezo resistive sensors
The sensor measures the pressure change between the vacuum chamber and the work chamber. The signal ratio between the chambers should correspond.
characteristic
Vacuum chamber (1): Voltage between terminals #30 (#A30) and #40 should be similar to diagram below.
Work chamber (2): Voltage between terminals 41 (A#41) and #40 should be similar to diagram below.